Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460913 | Plasma processing apparatus and plasma processing method | Nanako Tamari, Hitoshi Tamura | 2019-10-29 |
| 10217613 | Plasma processing apparatus | Tetsuo Kawanabe, Takumi Tandou, Tsutomu Tetsuka | 2019-02-26 |
| 10192718 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi | 2019-01-29 |