Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522331 | Plasma processing apparatus | Michikazu Morimoto, Yuuzou Oohirabaru, Tetsuo Ono | 2019-12-31 |
| 10192718 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Naoki Yasui | 2019-01-29 |