Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262835 | Plasma processing equipment and plasma generation equipment | — | 2019-04-16 |
| 10229813 | Plasma processing apparatus with lattice-like faraday shields | Tadayoshi Kawaguchi, Tsutomu Tetsuka | 2019-03-12 |