Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446359 | Charged particle beam device | Toshiyuki Yokosuka, Yuzuru Mizuhara, Hajime Kawano | 2019-10-15 |
| 10446361 | Aberration correction method, aberration correction system, and charged particle beam apparatus | Zhaohui Cheng, Tomonori Nakano, Kotoko Urano, Takeyoshi Ohashi, Yasunari Sohda | 2019-10-15 |
| 10304654 | Charged particle beam device | Akira Ikegami, Yuta Kawamoto, Hideto Dohi, Manabu Yano, Yutaka Tandai | 2019-05-28 |
| 10290464 | Charged particle beam device and pattern measurement device | Toshiyuki Yokosuka, Chahn Lee, Manabu Hasegawa | 2019-05-14 |
| 10249474 | Charged particle beam device | Toshiyuki Yokosuka, Chahn Lee, Hajime Kawano, Shahedul Hoque, Kumiko Shimizu +1 more | 2019-04-02 |
| 10229811 | Charged particle beam inclination correction method and charged particle beam device | Yuzuru Mizuhara | 2019-03-12 |