Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446361 | Aberration correction method, aberration correction system, and charged particle beam apparatus | Zhaohui Cheng, Tomonori Nakano, Kotoko Urano, Yasunari Sohda, Hideyuki Kazumi | 2019-10-15 |