Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504774 | Lithographic patterning to form fine pitch features | Sunil Kumar Singh, Sohan S. Mehta, Ravi Prakash Srivastava | 2019-12-10 |
| 10401724 | Pellicle replacement in EUV mask flow | Oktawian Sobieraj, Paul Ackmann | 2019-09-03 |
| 10265739 | Method and apparatus for treating substrates | Uwe Dietze, Peter Dress | 2019-04-23 |