Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495259 | Fluid delivery system and method | Glenn M. Tom, Donald D. Ware, Richard Chism, Mitchell W. McFeron | 2019-12-03 |
| 10385452 | Source reagent-based delivery of fluid with high material flux for batch deposition | Bryan C. Hendrix, John N. Gregg, Scott L. Battle, Donn K. Naito, Kyle Bartosh +2 more | 2019-08-20 |