Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10385452 | Source reagent-based delivery of fluid with high material flux for batch deposition | Bryan C. Hendrix, John N. Gregg, Scott L. Battle, Donn K. Naito, John M. Cleary +2 more | 2019-08-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10385452 | Source reagent-based delivery of fluid with high material flux for batch deposition | Bryan C. Hendrix, John N. Gregg, Scott L. Battle, Donn K. Naito, John M. Cleary +2 more | 2019-08-20 |