Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10465286 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Scott L. Battle, Jeffrey I. Banton, Ravi Laxman | 2019-11-05 |
| 10385452 | Source reagent-based delivery of fluid with high material flux for batch deposition | Bryan C. Hendrix, John N. Gregg, Scott L. Battle, Kyle Bartosh, John M. Cleary +2 more | 2019-08-20 |
| 10358263 | Ultra-high purity storage and dispensing of liquid reagents | Andy Krell, Mitchell W. McFeron, Steven Jackson, Joel L. Robison | 2019-07-23 |