Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10354877 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Sharad N. Yedave, Joseph D. Sweeney +1 more | 2019-07-16 |
| 10229840 | Ion implanter comprising integrated ventilation system | W. Karl Olander, Ying Tang, Steven E. Bishop | 2019-03-12 |