Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497532 | Ion implantation processes and apparatus | Joseph D. Sweeney | 2019-12-03 |
| 10497569 | Carbon materials for carbon implantation | Joseph D. Sweeney, Robert Kaim | 2019-12-03 |
| 10354877 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Edward A. Sturm, Ying Tang, Sharad N. Yedave, Joseph D. Sweeney, Steven G. Sergi +1 more | 2019-07-16 |