Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10354877 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Joseph D. Sweeney, Steven G. Sergi +1 more | 2019-07-16 |