Showing 1–6 of 6 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Frank Laske | Kla-Tencor | 5 |
| 2 | Stefan Eyring | Kla | 3 |
| 3 | Dominic Mueller-Wicke | IBM | 2 |
| #4 | Slawomir Czerkas | Vistec Semiconductor Systems Gmbh | 1 |
| #4 | Martina Haustein | Kuster Holding Gmbh | 1 |
| #4 | Thomas Heidrich | Manitowoc Crane Group France | 1 |