Showing 1–6 of 6 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Takatoshi Orui | Sharp Kabushiki Kaisha | 3 |
| 1 | Masato Horiguchi | Tokyo Electron Limited | 3 |
| 3 | Wataru Ozawa | Tokyo Electron Limited | 2 |
| #4 | Hiroki Konno | Shin-Etsu Chemical Co. | 1 |
| #4 | Kimihiro Fukasawa | Tokyo Electron Limited | 1 |
| #4 | Eiichi Sugawara | Tokyo Electron Limited | 1 |