Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488753 | Substrate pretreatment and etch uniformity in nanoimprint lithography | Timothy Brian Stachowiak, Weijun Liu, Fen Wan, Gary F. Doyle | 2019-11-26 |
| 10303049 | Reducing electric charge in imprint lithography | — | 2019-05-28 |
| 10304690 | Fluid dispense methodology and apparatus for imprint lithography | Dwayne L. LaBrake | 2019-05-28 |
| 10211051 | Method of reverse tone patterning | Dwayne L. LaBrake | 2019-02-19 |