Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488753 | Substrate pretreatment and etch uniformity in nanoimprint lithography | Timothy Brian Stachowiak, Weijun Liu, Fen Wan, Niyaz Khusnatdinov | 2019-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488753 | Substrate pretreatment and etch uniformity in nanoimprint lithography | Timothy Brian Stachowiak, Weijun Liu, Fen Wan, Niyaz Khusnatdinov | 2019-11-26 |