Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10317804 | Substrate table, lithographic apparatus and method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman +6 more | 2019-06-11 |
| 10310394 | Lithographic apparatus, a projection system and a device manufacturing method | Johannes Hubertus Josephina Moors, Wendelin Johanna Maria Versteeg, Peter Gerardus Jonkers | 2019-06-04 |
| 10261422 | Lithography apparatus and method of manufacturing a device | Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more | 2019-04-16 |