Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10324383 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelius Gerardus Van Der Sanden, Geoffrey O'Connor +1 more | 2019-06-18 |
| 10310391 | Electrostatic clamp and a method for manufacturing the same | Matthew Lipson, Vincent Dimilia, Ronald Peter Totillo, Steven M. Zimmerman | 2019-06-04 |