Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429750 | Alignment mark recovery method and lithographic apparatus | Cayetano Sanchez-Fabres Cobaleda | 2019-10-01 |
| 10191390 | Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus | Paul Cornelis Hubertus Aben, Jurgen Johannes Henderikus Maria Schoonus, David Deckers | 2019-01-29 |