Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10191390 | Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus | Paul Cornelis Hubertus Aben, Sanjaysingh Lalbahadoersing, David Deckers | 2019-01-29 |