Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459345 | Focus-dose co-optimization based on overlapping process window | Stefan Hunsche, Chiou-hung Jang, Vito Tomasello | 2019-10-29 |
| 10394136 | Metrology method for process window definition | Wim Tjibbo Tel | 2019-08-27 |