Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394136 | Metrology method for process window definition | Marinus Jochemsen | 2019-08-27 |
| 10289009 | Lithographic apparatus, control method and computer program product | Bram Van Hoof | 2019-05-14 |