Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10435786 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Danny D. WANG, Jun Tae Choi, Rupankar Choudhury, Juan Carlos Rocha-Alvarez, Jason Michael Lamb | 2019-10-08 |