Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10435786 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Jun Tae Choi, Rupankar Choudhury, Zhong Qiang Hua, Juan Carlos Rocha-Alvarez, Jason Michael Lamb | 2019-10-08 |