Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410878 | Hydrofluorocarbons containing —NH2 functional group for 3D NAND and DRAM applications | Hui SUN, Fabrizio Marchegiani, Nathan Stafford, Rahul Gupta | 2019-09-10 |
| 10217681 | Gases for low damage selective silicon nitride etching | Venkateswara R. Pallem, Rahul Gupta | 2019-02-26 |