Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256109 | Nitrogen-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta | 2019-04-09 |
| 10217681 | Gases for low damage selective silicon nitride etching | James Royer, Rahul Gupta | 2019-02-26 |