Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410878 | Hydrofluorocarbons containing —NH2 functional group for 3D NAND and DRAM applications | Hui SUN, Fabrizio Marchegiani, James Royer, Rahul Gupta | 2019-09-10 |
| 10381240 | Fluorocarbon molecules for high aspect ratio oxide etch | Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Christian Dussarrat | 2019-08-13 |
| 10347498 | Methods of minimizing plasma-induced sidewall damage during low K etch processes | Chih-Yu Hsu, Peng Shen | 2019-07-09 |