Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10297472 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Fuping Chen, Liangzhi Xie, Xi Wang, Xiaoyan Zhang | 2019-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10297472 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Fuping Chen, Liangzhi Xie, Xi Wang, Xiaoyan Zhang | 2019-05-21 |