Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410906 | Substrate supporting apparatus | Hui Wang, Huaidong ZHANG, Wenjun Wang | 2019-09-10 |
| 10297472 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Liangzhi Xie, Shena Jia, Xi Wang, Xiaoyan Zhang | 2019-05-21 |