Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157763 | High throughput substrate handling endstation and sequence | Eric D. Hermanson, Benjamin B. Riordon | 2018-12-18 |
| 10152033 | Proportional integral derivative control incorporating multiple actuators | Jack J. LoPiccolo | 2018-12-11 |
| 9891599 | Proportional integral derivative control incorporating multiple actuators | Jack J. LoPiccolo | 2018-02-13 |