MD

Michael S. DeLucia

VA Varian Semiconductor Equipment Associates: 1 patents #62 of 139Top 45%
🗺 Massachusetts: #4,566 of 12,682 inventorsTop 40%
Overall (2018): #306,067 of 503,207Top 65%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9978554 Dual cathode ion source Bon-Woong Koo, Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro +2 more 2018-05-22