Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10079185 | Semiconductor pattern for monitoring overlay and critical dimension at post-etching stage and metrology method of the same | Chien-Hao Chen, Chien-Wei Huang, Chia-Hung Wang | 2018-09-18 |