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Method for fabricating semiconductor device |
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2018-11-27 |
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Method for fabricating semiconductor device having a patterned metal layer embedded in an interlayer dielectric layer |
Ching-Ling Lin, Chih-Sen Huang, Ching-Wen Hung, Tsung-Hung Chang, Yi-Hui Lee +1 more |
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| 9985020 |
Semiconductor structure and manufacturing method thereof |
Ching-Wen Hung, Yi Wu, Yi-Hui Lee, Ying-Cheng Liu, Chih-Sen Huang +1 more |
2018-05-29 |
| 9941215 |
Semiconductor device and method for fabricating the same |
Ching-Wen Hung, Yi-Hui Lee, Ying-Cheng Liu, Chih-Sen Huang |
2018-04-10 |
| 9899322 |
Method for fabricating semiconductor device having a patterned metal layer embedded in an interlayer dielectric layer |
Ching-Ling Lin, Chih-Sen Huang, Ching-Wen Hung, Tsung-Hung Chang, Yi-Hui Lee +1 more |
2018-02-20 |
| 9859170 |
Method of forming semiconductor structure |
Ching-Wen Hung, Wei-Cyuan Lo, Ming-Jui Chen, Chia-Lin Lu, Yi-Hui Lee +8 more |
2018-01-02 |