Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9995569 | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage | Yu Zhu, Ming Zhang, Anlin Chen, Rong Cheng, Kaiming Yang +6 more | 2018-06-12 |
| 9869857 | Optical grating phase modulator for laser interference photoetching system | Yu Zhu, Ming Zhang, Leijie Wang, Rong Cheng, Kaiming Yang +5 more | 2018-01-16 |