Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9995569 | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage | Yu Zhu, Ming Zhang, Anlin Chen, Kaiming Yang, Feng Liu +6 more | 2018-06-12 |
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Ming Zhang, Zhao Liu, Kaiming Yang +10 more | 2018-02-27 |
| 9904183 | Coarse motion and fine motion integrated reticle stage driven by planar motor | Yu Zhu, Ming Zhang, Fan Zhi, Zhao Liu, Kaiming Yang +9 more | 2018-02-27 |
| 9869857 | Optical grating phase modulator for laser interference photoetching system | Yu Zhu, Ming Zhang, Leijie Wang, Kaiming Yang, Zhao Liu +5 more | 2018-01-16 |