Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Ming Zhang, Zhao Liu, Rong Cheng, Kaiming Yang +10 more | 2018-02-27 |
| 9885556 | Dual-frequency grating interferometer displacement measurement system | Yu Zhu, Ming Zhang, Jinchun Hu, Longmin Chen, Kaiming Yang +3 more | 2018-02-06 |
| 9879979 | Heterodyne grating interferometer displacement measurement system | Ming Zhang, Yu Zhu, Jinchun Hu, Longmin Chen, Kaiming Yang +3 more | 2018-01-30 |
| 9869857 | Optical grating phase modulator for laser interference photoetching system | Yu Zhu, Ming Zhang, Rong Cheng, Kaiming Yang, Zhao Liu +5 more | 2018-01-16 |