Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131986 | Method of forming metal film | Kenji Suzuki, Koji Maekawa, Yasushi Aiba | 2018-11-20 |
| 10026616 | Method of reducing stress in metal film and metal film forming method | Kenji Suzuki, Koji Maekawa, Yasushi Aiba | 2018-07-17 |
| 9938620 | Gas supply mechanism, gas supplying method, film forming apparatus and film forming method using the same | Masayuki Moroi, Hajime Yamanaka, Yasushi Aiba | 2018-04-10 |