Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9938620 | Gas supply mechanism, gas supplying method, film forming apparatus and film forming method using the same | Masayuki Moroi, Yasushi Aiba, Takanobu HOTTA | 2018-04-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9938620 | Gas supply mechanism, gas supplying method, film forming apparatus and film forming method using the same | Masayuki Moroi, Yasushi Aiba, Takanobu HOTTA | 2018-04-10 |