Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047436 | Raw material supply method, raw material supply apparatus, and storage medium | — | 2018-08-14 |
| 9938620 | Gas supply mechanism, gas supplying method, film forming apparatus and film forming method using the same | Hajime Yamanaka, Yasushi Aiba, Takanobu HOTTA | 2018-04-10 |