Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960056 | Substrate cleaning method, substrate cleaning apparatus and vacuum processing system | Kazuya Dobashi, Kensuke Inai | 2018-05-01 |
| 9881815 | Substrate cleaning method, substrate cleaning device, and vacuum processing device | Jiro Matsuo, Toshio Seki, Takaaki Aoki, Kazuya Dobashi, Kensuke Inai | 2018-01-30 |
| 9875915 | Method for removing metal contamination and apparatus for removing metal contamination | Yudai ITO, Kazuya Dobashi, Shigeyoshi Kojima, Hideki Nishimura | 2018-01-23 |