Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163622 | Substrate cleaning method, substrate processing method, substrate processing system and semiconductor device manufacturing method | Nobuyuki Takahashi, Tatsuya Suzuki | 2018-12-25 |
| 10049899 | Substrate cleaning apparatus | Kensuke Inai | 2018-08-14 |
| 9960056 | Substrate cleaning method, substrate cleaning apparatus and vacuum processing system | Kensuke Inai, Misako Saito | 2018-05-01 |
| 9881815 | Substrate cleaning method, substrate cleaning device, and vacuum processing device | Jiro Matsuo, Toshio Seki, Takaaki Aoki, Kensuke Inai, Misako Saito | 2018-01-30 |
| 9875915 | Method for removing metal contamination and apparatus for removing metal contamination | Yudai ITO, Misako Saito, Shigeyoshi Kojima, Hideki Nishimura | 2018-01-23 |