Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049899 | Substrate cleaning apparatus | Kazuya Dobashi | 2018-08-14 |
| 9960056 | Substrate cleaning method, substrate cleaning apparatus and vacuum processing system | Kazuya Dobashi, Misako Saito | 2018-05-01 |
| 9881815 | Substrate cleaning method, substrate cleaning device, and vacuum processing device | Jiro Matsuo, Toshio Seki, Takaaki Aoki, Kazuya Dobashi, Misako Saito | 2018-01-30 |