Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031426 | Method and system for overlay control | Chih-Ming Ke, Kai-Hsiung Chen | 2018-07-24 |
| 10031997 | Forecasting wafer defects using frequency domain analysis | Che-Yuan Sun, Chih-Ming Ke, Chun-Ming Hu | 2018-07-24 |