Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163733 | Method of extracting defects | Jia-Rui Hu, Shu-Chuan Chuang, Che-Yuan Sun | 2018-12-25 |
| 10031426 | Method and system for overlay control | Yang-Hung Chang, Kai-Hsiung Chen | 2018-07-24 |
| 10031997 | Forecasting wafer defects using frequency domain analysis | Yang-Hung Chang, Che-Yuan Sun, Chun-Ming Hu | 2018-07-24 |