Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090360 | Method of manufacturing a semiconductor structure including a plurality of trenches | Woan-Yun HSIAO, Ya-Chin King, Chrong-Jung Lin, Huang-Kui Chen | 2018-10-02 |
| 10073354 | Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool | Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu +4 more | 2018-09-11 |
| 9870998 | Semiconductor arrangement having an overlay alignment mark with a height shorter than a neighboring gate structure | Tsung-Yu Chiang, Chen Kuang-Hsin, Bor-Zen Tien | 2018-01-16 |