Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161545 | Chemical dispense system with reduced contamination | Rong Pan, Yung-Long Chen, Heng-Yi Tzeng, Chih-Chiang Tseng | 2018-12-25 |
| 9997384 | Methods for transporting wafers between wafer holders and chambers | Ming-Jung Chen, Tzu-Yang Chung, Chi-Yun Tseng, Rui-Ping Chuang | 2018-06-12 |
| 9887095 | System and method for an etch process with silicon concentration control | Fu Yi Chang, Yih-Song Chiu | 2018-02-06 |
| 9881816 | Cleaning composition and method for semiconductor device fabrication | Chia-Wen Li, Bo-Wei Chou, Chen Ming-Jung | 2018-01-30 |