Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997384 | Methods for transporting wafers between wafer holders and chambers | Shao-Yen Ku, Tzu-Yang Chung, Chi-Yun Tseng, Rui-Ping Chuang | 2018-06-12 |
| 9895949 | Retractable suspension system | Ting-Yu Lu, Chai-Min Chiang, Chen-Chou Lin, Jyh-Jone Lee | 2018-02-20 |