Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997384 | Methods for transporting wafers between wafer holders and chambers | Shao-Yen Ku, Ming-Jung Chen, Tzu-Yang Chung, Rui-Ping Chuang | 2018-06-12 |
CT
Chi-Yun Tseng
Overall (2018): #454,672 of 503,207Top 95%
1
Patents 2018