Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161039 | Apparatus and method for spatial atomic layer deposition | Anthony Hong Lin, Ching-Lun Lai, Tze-Liang Lee | 2018-12-25 |
| 10084040 | Seamless gap fill | Yen-Chun Huang, Bor Chiuan Hsieh, Tai-Chun Huang, Tze-Liang Lee | 2018-09-25 |
| 9911829 | FinFET with bottom SiGe layer in source/drain | Ming-Hua Yu, Tze-Liang Lee | 2018-03-06 |
| 9873943 | Apparatus and method for spatial atomic layer deposition | Anthony Hong Lin, Ching-Lun Lai, Tze-Liang Lee | 2018-01-23 |
| 9865709 | Selectively deposited spacer film for metal gate sidewall protection | Tsai-Jung Ho | 2018-01-09 |
| 9859386 | Self aligned contact scheme | Tsai-Jung Ho, Kuang-Yuan Hsu | 2018-01-02 |