Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161039 | Apparatus and method for spatial atomic layer deposition | Anthony Hong Lin, Pei-Ren Jeng, Tze-Liang Lee | 2018-12-25 |
| 10043892 | Method for manufacturing a semiconductor device | Chia-Ying Li, Ming-Shiou Kuo, Wei Wu, Zong-Han Li | 2018-08-07 |
| 9873943 | Apparatus and method for spatial atomic layer deposition | Anthony Hong Lin, Pei-Ren Jeng, Tze-Liang Lee | 2018-01-23 |
| 9871137 | Method for forming semiconductor device structure | Shin-Yeh Huang, Kai-Hsiang Chang, Chih-Chen Jiang, Yi-Wei Peng, Kuan-Yu Lin +1 more | 2018-01-16 |